With its patented architecture, the Prismo D- BLUE? system can accommodate up to 4 reactors, and process up to 232 2-inch wafers or 56 4-inch wafers simultaneously. It is extendible to 6 and 8-inch wafer production. Each reactor is controlled independently—an inventive design that enables exceptional manufacturing flexibility. The Prismo D- BLUE system is the industry’s first MOCVD tool that was pioneered, developed and manufactured in China, and is now used by LED and power device customers for volume production.
MOCVD solution for LED and power device volume production
Independently controllable reactors
Advanced in-situ, real-time monitoring system
Precise process parameters control
Automated and programmable maintenance routines
SEMI S2 certified
Superb process repeatability, simplified process adjustment and improved production yield
High productivity, high throughput and low cost with 480mm susceptor
Integrated lid lifting mechanism, simplified tool maintenance and maximized equipment utilization
SEMI S2 certifi
